The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2006
Filed:
Mar. 14, 2003
Hiroaki Saeki, Nirasaki, JP;
Teruo Asakawa, Tokyo-To, JP;
Hiroaki Saeki, Nirasaki, JP;
Teruo Asakawa, Tokyo-To, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
There is provided a transfer apparatus capable of increasing the length of a transfer arm when it is extended, without increasing the size of the transfer arm when it is contracted. The transfer apparatuscomprising a transfer armwhich comprises: two rotating shaftsandarranged coaxially or in parallel; a pair of first armsand, one end portions of which are fixed to the rotating shaftsand, respectively; a pair of second armsand, one end portions of which are connected to the other end portions of the pair of first armsandby means of pins, respectively; and a holding portionfor holding an object w to be processed, the holding portionbeing connected to each of the other end portions of the pair of second armsandby means of pins, wherein the second armsandcross each other.