The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 17, 2006

Filed:

May. 07, 2003
Applicants:

Jon B. Dcamp, Savage, MN (US);

Harlan L. Curtis, Champlin, MN (US);

Lori A. Dunaway, New Hope, MN (US);

Max C. Glenn, Chanhassen, MN (US);

Inventors:

Jon B. DCamp, Savage, MN (US);

Harlan L. Curtis, Champlin, MN (US);

Lori A. Dunaway, New Hope, MN (US);

Max C. Glenn, Chanhassen, MN (US);

Assignee:

Honeywell International Inc., Morristown, NJ (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/14 (2006.01); H01L 29/82 (2006.01); H01L 29/84 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for assembling a micro-electromechanical system (MEMS) device that includes a micro-machine is described. The method comprises forming the micro-machine on a die, the die having a top surface and a bottom surface, providing a plurality of die bonding pedestals on a surface of a housing, and mounting at least one of the top surface of the die and components of the micro-machine to the die bonding pedestals such that a bottom surface of the die at least partially shields components of the micro-machine from loose gettering material.


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