The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2006
Filed:
Nov. 21, 2003
William Dale Jones, Phoenix, AZ (US);
Bryan J. Seegers, Phoenix, AZ (US);
Hugh Gybbon Spilsbury, Scottsdale, AZ (US);
William Dale Jones, Phoenix, AZ (US);
Bryan J. Seegers, Phoenix, AZ (US);
Hugh Gybbon Spilsbury, Scottsdale, AZ (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
In accordance with an embodiment of the present invention, a pump assembly for circulating a supercritical fluid is disclosed. The pump assembly comprises an impeller for pumping fluid between a pump inlet and a pump outlet; a rotating pump shaft coupled to the impeller, wherein the pump shaft is supported by corrosion resistant bearings; a rotor of a DC motor potted in epoxy and encased in a non-magnetic material sleeve; and a stator sealed from the fluid via a polymer sleeve. The pump can be of centrifugal type. The bearings can be made of silicon nitride balls combined with bearing races made of Cronidur® and can operate without oil or grease lubrication. The polymer sleeve can be a PEEK™ sleeve which forms a casing for the stator. The non-magnetic material sleeve encasing the rotor of the DC motor is preferably made of stainless steel. A portion of the fluid passing through the pump assembly can be diverted over the bearings and/or the rotor and stator.