The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2006
Filed:
Mar. 05, 2004
Tatumi Hiramoto, Tokyo, JP;
Kazuaki Hota, Sagamihaa, JP;
Tatumi Hiramoto, Tokyo, JP;
Kazuaki Hota, Sagamihaa, JP;
Ushiodenki Kabushiki Kaisha, Tokyo, JP;
Abstract
A usable 13.5 nm radiation source in which Sn is the radiation substance, in which rapid transport with good reproducibility is possible up to the plasma generation site and in which formation of detrimental 'debris' and coagulation of the vapor are suppressed as much as possible is achieved using emission of Sn ions in that SnHis supplied continuously or intermittently to the heating/ excitation part, is subjected to discharge heating and excitation or laser irradiation heating and excitation, and thus, is converted into a plasma from which extreme UV light with a main wavelength of 13.5 nm is emitted.