The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2006
Filed:
Sep. 10, 2004
Masanobu Nogome, Bizen, JP;
Akiyoshi Tamura, Suita, JP;
Keiichi Murayama, Okayama, JP;
Kazutsune Miyanaga, Okayama, JP;
Yoshitaka Kuroishi, Bizen, JP;
Masanobu Nogome, Bizen, JP;
Akiyoshi Tamura, Suita, JP;
Keiichi Murayama, Okayama, JP;
Kazutsune Miyanaga, Okayama, JP;
Yoshitaka Kuroishi, Bizen, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
A GaAs substrateis rotated, a photosensitive silicone resistis applied on a surface of the GaAs substrateon which an aperture of a holeto be a via hole, and an inside of the holeto be the via hole is filled in with the photosensitive silicone resistNext, the GaAs substrateis further rotated, changing the number of revolutions (rpm), and the photosensitive silicone resiston the GaAs substrate is flattened. Next, a reverse side of the GaAs substrate is grinded, the holeto be the via hole penetrates the GaAs substratefrom the surface to the reverse side and the via holeis formed. Next, a reverse side electrodeis formed on the reverse side of the GaAs substrateNext, the GaAs sustrateis divided chip by chip and chips are laid on a substrate for assemblyvia an adhesive metal