The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2006
Filed:
Feb. 11, 2002
Applicants:
Takashi Tanaka, Kikuchi-gun, JP;
Shinji Nagashima, Kikuchi-gun, JP;
Inventors:
Takashi Tanaka, Kikuchi-gun, JP;
Shinji Nagashima, Kikuchi-gun, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B05C 13/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The apparatus of the present invention for forming a coating film on a substrate by applying a coating liquid to the substrate comprises: a spin chuck for holding the substrate; a motor for rotating the spin chuck; and a nozzle for dropping the coating liquid on the center surface of the substrate. The nozzle included a spiral groove or a plurality of fins for giving a gyrating force to the dropped coating liquid.
Tanaka, Takashi. (2006). Apparatus and method for forming coating film (U.S. Patent No. 6982002). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6982002
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile