The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2005
Filed:
Dec. 07, 2001
Applicant:
Timothy S. Hayes, Colchester, VT (US);
Inventor:
Timothy S. Hayes, Colchester, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
G06F007/60 ;
U.S. Cl.
CPC ...
Abstract
A method and system for quantifying profile characteristics of semiconductor devices, including receiving profile data for a device under evaluation and isolating from the profile data a region indicating a profile edge. The profile edge data is rotated by ninety degrees to become rotated profile edge data. The non-rotated profile edge data or rotated profile edge data is then used to calculate at least one geometric parameter describing the profile edge.