The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2005
Filed:
Jul. 28, 2003
Matthew S. Buynoski, Palo Alto, CA (US);
Connie Pin-chin Wang, Menlo Park, CA (US);
Paul R. Besser, Sunnyvale, CA (US);
Minh Q. Tran, Milpitas, CA (US);
Matthew S. Buynoski, Palo Alto, CA (US);
Connie Pin-Chin Wang, Menlo Park, CA (US);
Paul R. Besser, Sunnyvale, CA (US);
Minh Q. Tran, Milpitas, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
A method of forming a conductive structure such as a copper conductive structure, line, or via is optimized for large grain growth and distribution of alloy elements. The alloy elements can reduce electromigration problems associated with the conductive structure. The conductive structure is self-annealed or first annealed in a low temperature process over a longer period of time. Another anneal is utilized to distribute alloy elements.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile