The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2005
Filed:
Jun. 22, 2001
Yuji Matsuyama, Kikuchi-gun, JP;
Yoji Mizutani, Kawasaki, JP;
Shinji Nagashima, Kikuchi-gun, JP;
Akira Yonemizu, Kumamoto, JP;
Yuji Matsuyama, Kikuchi-gun, JP;
Yoji Mizutani, Kawasaki, JP;
Shinji Nagashima, Kikuchi-gun, JP;
Akira Yonemizu, Kumamoto, JP;
Tokyo Electron Limited, Tokyo-to, JP;
Abstract
When a substrate coated with a coating solution which oxidizes at high temperatures is heat-treated, an oxygen concentration of a treatment atmosphere is lowered when the temperature is low. Next, the substrate is heat-treated in the treatment atmosphere of which the oxygen concentration is lowered. Sequentially, the treatment atmosphere is returned to that with the original oxygen concentration after the passage of a predetermined time after completing the heat treatment. Thereby, the substrate can be heat-treated, with the oxidization of the coating solution being controlled.