The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2005
Filed:
Dec. 02, 2004
Takayuki Masunaga, Yokohama, JP;
Shinobu Oofuchi, Kawasaki, JP;
Hiromichi Isogai, Shibata, JP;
Katsuyoshi Kojima, Shibata, JP;
Takayuki Masunaga, Yokohama, JP;
Shinobu Oofuchi, Kawasaki, JP;
Hiromichi Isogai, Shibata, JP;
Katsuyoshi Kojima, Shibata, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Toshiba Ceramics Co., LTD, Tokyo, JP;
Abstract
A polishing head includes a head body, a first recessed portion formed in the lower surface of the head body, a support plate which can be moved up and down in the first recessed portion, a first film-like member in which a first space is formed between the upper surface of the support plate and the head body, a second recessed portion formed in a lower surface of the support plate, a second film-like member, in which a second space is formed between the second film-like member and the support plate, and which holds a wafer on the lower, a communicating hole which is formed in the support plate to communicate the first space with the second space, and a gas supply device which increases pressures in the first and second spaces with a fluid to equal pressures to bring the object into press contact with the polishing pad.