The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2005
Filed:
Sep. 20, 2002
Applicants:
Sachiyo Ito, Yokohama, JP;
Masahiko Hasunuma, Yokohama, JP;
Takashi Kawanoue, Yokohama, JP;
Inventors:
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L023/48 ;
U.S. Cl.
CPC ...
Abstract
A semiconductor device includes a semiconductor substrate on which an element is formed, a low dielectric constant insulation film formed over the semiconductor substrate and having a relative dielectric constant of 3 or lower, a plug and a wiring layer buried in the low dielectric constant insulation film, and a high Young's modulus insulation film having a Young's modulus of 15 GPa or higher and formed in contact with a side of the plug between the low dielectric constant insulation film and the plug.