The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2005
Filed:
Sep. 18, 2003
Jacob Johannes Scholtz, AV Eindhoven, NL;
William Ralph Knowles, Newbury, MA (US);
Bradley Lamar Thiel, Cambridge, GB;
Gerardus Van Veen, Waalre, NL;
Rene Peter Marie Schroemges, Baarlo, NL;
Jacob Johannes Scholtz, AV Eindhoven, NL;
William Ralph Knowles, Newbury, MA (US);
Bradley Lamar Thiel, Cambridge, GB;
Gerardus Van Veen, Waalre, NL;
Rene Peter Marie Schroemges, Baarlo, NL;
FEI Company, Hillsboro, OR (US);
Abstract
A particle-optical apparatus comprising a sample holder for receiving a sample, a particle source embodied to produce a primary beam of first electrically charged particles along an optical axis for the purpose of irradiating the sample, first detector embodied to detect second electrically charged particles that emanate from the sample as a result of the irradiation thereof, a detection space that at the least is formed by the sample holder and the first detector, and an immersion lens embodied to produce a magnetic field for the purpose of focusing the primary beam in the vicinity of the sample holder. The first detector are embodied to produce an electric field in the detection space, and the detection space is embodied to comprise a gas.