The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2005
Filed:
Aug. 13, 2002
Applicants:
Hsien-jung Hsu, Taipei, TW;
Chin-yen Lin, Hsin-Chu, TW;
Hsiang-jui Cheng, Hsinchu, TW;
Inventors:
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin Chu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F019/00 ; G06F003/00 ; G06F009/00 ; G05B015/00 ;
U.S. Cl.
CPC ...
Abstract
A flexible recipe modeling system and method is provided for improving the processing reliability of a fabrication process by customizing recipes processed by fabrication equipment including associated different chambers of a multi-chamber processing machine by allowing a responsible engineer to add or modify individual recipe clusters including grouping of recipes into clusters to represent the same process capacity for a piece of fabrication equipment and providing a material execute system having a recipe cluster management engine (RCME) for management of the RCMS.