The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2005
Filed:
Jan. 17, 2002
Applicants:
Nobuo Ishii, Amagasaki, JP;
Makoto Ando, Kawasaki-shi, Kanagawa, JP;
Inventors:
Nobuo Ishii, Amagasaki, JP;
Makoto Ando, Kawasaki-shi, Kanagawa, JP;
Assignees:
Tokyo Electron Limited, Tokyo, JP;
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01Q001/26 ;
U.S. Cl.
CPC ...
Abstract
A plasma apparatus includes a slot antenna () supplying an electromagnetic field to a container in which plasma is generated. Slot antenna () has a slot () so formed that a radiation plane () at a periphery B thereof allows the electromagnetic field to provide radiation smaller per unit area in amount than at an intermediate region C thereof located between a center A and periphery B thereof.