The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6967368 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 22, 2005

Filed:

Sep. 01, 2004
Applicants:

Toru Ozaki, Tokyo, JP;

Yoshinori Kumura, Yokohama, JP;

Yoshiro Shimojo, Yokohama, JP;

Inventors:

Toru Ozaki, Tokyo, JP;

Yoshinori Kumura, Yokohama, JP;

Yoshiro Shimojo, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L029/76 ; H01L027/108 ;
U.S. Cl.
CPC ...
Abstract

A ferro-electric memory device includes a first ferro-electric capacitor which is selectively formed on a first insulating film and has a first lower electrode, a first ferro-electric film, and a first upper electrode, a first hydrogen barrier film which has first to third portions, the first portion being formed on the first insulating film, the second portion covering the side surfaces of the first lower electrode, first ferro-electric film, and first upper electrode, and the third portion being formed on the upper surface of the first upper electrode, a first interlayer formed on the second portion, and a second hydrogen barrier film which has fourth to sixth portions, the fourth portion having a first contact portion which comes into contact with at least part of the first portion, the fifth portion being formed on the first interlayer, and the sixth portion being formed on the third portion.


Find Patent Forward Citations

Ozaki, Toru. (2005). Ferro-electric memory device and method of manufacturing the same (U.S. Patent No. 6967368). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6967368

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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