The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2005
Filed:
Apr. 12, 2002
Bulent M. Basol, Manhattan Beach, CA (US);
Jeffrey A. Bogart, Los Gatos, CA (US);
Efrain Velazquez, San Jose, CA (US);
Bulent M. Basol, Manhattan Beach, CA (US);
Jeffrey A. Bogart, Los Gatos, CA (US);
Efrain Velazquez, San Jose, CA (US);
ASM Nutool, Inc., Fremont, CA (US);
Abstract
In one aspect, the present invention monitors a signal corresponding to a torque value of a motor that is used to maintain relative motion between a conductive top surface of a workpiece and a workpiece surface influencing device in the presence of physical contact between the conductive top surface of the workpiece and the workpiece surface influencing device. In another aspect, the present invention uses the signal to control a force applied to a top conductive surface of a workpiece during electrotreatment.