The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2005
Filed:
Nov. 12, 2003
Yasuyo Muto, Tochigi, JP;
Kazunori Iwamoto, Tochigi, JP;
Yukio Takabayashi, Saitama, JP;
Takashi Meguro, Tochigi, JP;
Yasuyo Muto, Tochigi, JP;
Kazunori Iwamoto, Tochigi, JP;
Yukio Takabayashi, Saitama, JP;
Takashi Meguro, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A stage apparatus has a substrate holding unit which chucks and holds a substrate, and includes a flat surface having a recess where the substrate holding unit is to be mounted. A fixing member fixes a projection support provided to the substrate holding unit onto the flat surface. The substrate holding unit is supported by the fixing member while a distal end of the projection support is in contact with the recess of the flat surface and the remaining portion of the substrate holding unit is not in contact with the flat surface.