The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2005
Filed:
Jan. 31, 2003
John A. Rule, Hingham, MS (US);
Richard C. Morton, San Diego, CA (US);
Vladimir V. Fleurov, Escondido, CA (US);
Fedor Trintchouk, San Diego, CA (US);
Toshihiko Ishihara, San Diego, CA (US);
Alexander I. Ershov, San Diego, CA (US);
James A. Carmichael, Valley Center, CA (US);
John A. Rule, Hingham, MS (US);
Richard C. Morton, San Diego, CA (US);
Vladimir V. Fleurov, Escondido, CA (US);
Fedor Trintchouk, San Diego, CA (US);
Toshihiko Ishihara, San Diego, CA (US);
Alexander I. Ershov, San Diego, CA (US);
James A. Carmichael, Valley Center, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
An automatic Flaser gas control, for a modular high repetition rate ultraviolet gas discharge laser. The laser gas control includes techniques, monitors, and processor for monitoring the Fconsumption rates through the operating life of the laser system. These consumption rates are used by a processor programmed with an algorithm to determine Finjections needed to maintain laser beam quality within a delivery range. Preferred embodiments include Fcontrols for a two-chamber MOPA laser system.