The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2005
Filed:
Jul. 02, 2004
Applicants:
Takenobu Kishida, Osaka, JP;
Shinya Tada, Osaka, JP;
Atsushi Ikeda, Kyoto, JP;
Takeshi Harada, Osaka, JP;
Kohei Sugihara, Kyoto, JP;
Inventors:
Takenobu Kishida, Osaka, JP;
Shinya Tada, Osaka, JP;
Atsushi Ikeda, Kyoto, JP;
Takeshi Harada, Osaka, JP;
Kohei Sugihara, Kyoto, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L023/48 ; H01L023/52 ; H01L029/40 ;
U.S. Cl.
CPC ...
Abstract
A barrier layer is formed on an insulating or conducting film provided on a semiconductor substrate, and an electrode or an interconnect made from a conducting film is formed on the barrier layer. The barrier layer includes a tantalum film having the β-crystal structure.