The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6960784 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 01, 2005

Filed:

Jun. 18, 2003
Applicants:

Wallace W. Lin, San Jose, CA (US);

George E. Sery, San Francisco, CA (US);

Inventors:

Wallace W. Lin, San Jose, CA (US);

George E. Sery, San Francisco, CA (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L023/58 ;
U.S. Cl.
CPC ...
Abstract

A charging sensor is provided to detect charging signal during the manufacturing process of integrated circuits and various semiconductor devices. In one embodiment, the charging sensor includes a charging-sensitive insulator layer and complementary elements designed to effectively provide an indicative potential drop across the charging sensitive insulator.


Find Patent Forward Citations

Lin, Wallace. (2005). Charging sensor method and apparatus (U.S. Patent No. 6960784). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6960784

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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