The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2005
Filed:
May. 07, 2003
Raymon F. Thompson, Kalispell, MT (US);
Robert W. Berner, Kalispell, MT (US);
Gary L. Curtis, Kalispell, MT (US);
Stephen P. Culliton, Bozeman, MT (US);
Blaine G. Wright, Kalispell, MT (US);
Darryl S. Byle, Kalispell, MT (US);
Raymon F. Thompson, Kalispell, MT (US);
Robert W. Berner, Kalispell, MT (US);
Gary L. Curtis, Kalispell, MT (US);
Stephen P. Culliton, Bozeman, MT (US);
Blaine G. Wright, Kalispell, MT (US);
Darryl S. Byle, Kalispell, MT (US);
Semitool, Inc., Kalispell, MT (US);
Abstract
A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.