The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2005
Filed:
Feb. 27, 2004
Applicants:
Erwan Le Roy, San Jose, CA (US);
William B. Thompson, Los Altos, CA (US);
Inventors:
Erwan Le Roy, San Jose, CA (US);
William B. Thompson, Los Altos, CA (US);
Assignee:
Credence Systems Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L021/66 ; G01R031/26 ;
U.S. Cl.
CPC ...
Abstract
A method and system for registering a CAD layout to a Focused Ion Beam image for through-the substrate probing, without using an optical image and without requiring biasing, includes an improved method of trench endpointing during the FIB milling operation with a low beam energy. The method further includes removal of Ga at the trench floor using XeF, as well as the deposition of an insulating layer onto the trench floor.