The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2005
Filed:
Oct. 29, 2003
Applicant:
Peter Gilgunn, Pittsburgh, PA (US);
Inventor:
Peter Gilgunn, Pittsburgh, PA (US);
Assignee:
Infineon Technologies Richmond, LP, Sandston, VA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N029/24 ; G01N029/26 ;
U.S. Cl.
CPC ...
Abstract
An apparatus and method thereof includes at least one acoustic transducer for receiving acoustic emissions produced during a semiconductor fabrication process. The acoustic transducer is mounted to various mechanical components of a semiconductor processing equipment in a manner so that the acoustic transducer receives acoustic emissions produced during the fabrication process. The received acoustic emissions are analyzed in in-situ to identify and determine surface characteristics of the wafer.