The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 18, 2005

Filed:

Jan. 17, 2003
Applicants:

Deodatta Vinayak Shenai-khatkhate, Danvers, MA (US);

Michael Brendan Power, Newburyport, MA (US);

Artashes Amamchyan, Wakefield, MA (US);

Ronald L. Dicarlo, Jr., Newfields, NH (US);

Inventors:

Deodatta Vinayak Shenai-Khatkhate, Danvers, MA (US);

Michael Brendan Power, Newburyport, MA (US);

Artashes Amamchyan, Wakefield, MA (US);

Ronald L. DiCarlo, Jr., Newfields, NH (US);

Assignee:

Shipley Company, L.L.C., Marlborough, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F009/72 ; C07F009/02 ; C07F009/90 ; C23C016/00 ; H01L021/44 ;
U.S. Cl.
CPC ...
Abstract

Disclosed are methods of preparing monoalkyl Group VA metal dihalide compounds in high yield and high purity by the reaction of a Group VA metal trihalide with an organo lithium reagent or a compound of the formula RMX, where R is an alkyl, Mis a Group IIIA metal, X is a halogen and n is an integer fro 1 to 3. Such monoalkyl Group VA metal dihalide compounds are substantially free of oxygenated impurities, ethereal solvents and metallic impurities. Monoalkyl Group VA metal dihydride compounds can be easily produced in high yield and high purity by reducing such monoalkyl Group VA metal dihalide compounds.


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