The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2005
Filed:
Jun. 10, 2002
Edward Frederick Ezell, Warren, NJ (US);
Richard A. Hogle, Oceanside, CA (US);
Walter H. Whitlock, Chapel Hill, NC (US);
Graham A. Mcfarlane, Murrieta, CA (US);
Edward Frederick Ezell, Warren, NJ (US);
Richard A. Hogle, Oceanside, CA (US);
Walter H. Whitlock, Chapel Hill, NC (US);
Graham A. McFarlane, Murrieta, CA (US);
The BOC Group, Inc., Murray Hill, NJ (US);
Abstract
A method and apparatus is disclosed for producing fluorine by providing a contained fluorine precursor source located proximate to or remotely from an adsorbent bed, optionally in a replaceable unit that may be a replaceable module comprising both the fluorine source and the adsorbent bed. Fluorine derived preferably from a nitrogen trifluoride source and used to remove deposited silicon-containing impurities in reaction chambers is reclaimed from an adsorbent bed, and made available to the reaction chamber as a supplemental fluorine source to reduce the total required amount of nitrogen trifluoride source gas. The separation column adsorbent is regenerated in cyclical intervals using a reverse flow of inert gas.