The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2005
Filed:
Dec. 29, 2003
Leon Martin Levasier, Hedel, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Jacob Fredrik Friso Klinkhamer, Delft, NL;
Gerrit Johannes Nijmeijer, Eindhoven, NL;
Petra Albertina Margaretha Dekkers-rog, Eindhoven, NL;
Leon Martin Levasier, Hedel, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Jacob Fredrik Friso Klinkhamer, Delft, NL;
Gerrit Johannes Nijmeijer, Eindhoven, NL;
Petra Albertina Margaretha Dekkers-Rog, Eindhoven, NL;
ASML Netherlands, B.V., Veldhoven, NL;
Abstract
A method according to one embodiment of the invention may be performed using a calibration plate having at least one alignment marker and at least one height profile. First, the calibration plate is positioned using an alignment sensor. Then the height profile is measured by a height sensor. Then the calibration plate is rotated by substantially 180 degrees and the two operations are repeated. This procedure results in two measured height profiles, which are compared in order to find a best fit. The amount of shift performed to find the best fit is used to determine a distance between the alignment marker and the X,Y position of the measurement point of the height sensor.