The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2005
Filed:
Jun. 25, 2003
Kaveh Zarkar, Andover, MA (US);
Michael Frank L'bassi, Sterling, MA (US);
Mark James Quaratiello, Atkinson, NH (US);
Kaveh Zarkar, Andover, MA (US);
Michael Frank L'Bassi, Sterling, MA (US);
Mark James Quaratiello, Atkinson, NH (US);
MKS Instruments, Inc., Wilmington, MA (US);
Abstract
A system and method for in-situ verification and calibration of flow control devices includes a first network physical layer connecting the flow control devices to a flow verification device. A controller of the flow verification device is programmed to communicate with each of the flow control devices through the first network physical layer, receive gas specific information and a transfer function from each of the flow control devices, and verify the flow of each flow control device. The controller of the flow verification device is further programmed to communicate with each of the flow control devices through the first network physical layer and, if necessary, calibrate the flow control devices. The verification and calibration of the flow control devices is preferably carried out based upon a single command provided through a tool controller connected to a second network physical layer connected to the flow control devices.