The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2005
Filed:
Sep. 04, 2003
Ching-shan LU, Taichung, TW;
Ching-Shan Lu, Taichung, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Abstract
A system and method for equipment malfunction detection and diagnosis. The system includes equipment and a detection/diagnosis unit. The equipment transfers status information thereof to the detection/diagnosis unit at preset intervals. The detection/diagnosis unit receives and stores the status information of the equipment, and checks whether the status information conforms to a process control standard. If not, it is determined that the equipment has a malfunction, and the detection/diagnosis unit generates a notification or warning message, stops the operation of the equipment, and retrieves a recovery measure for the malfunction from a diagnostic database.