The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2005
Filed:
Sep. 07, 2001
Koichi Yamaguchi, Tokyo, JP;
Koichi Yamaguchi, Tokyo, JP;
Lintec Corporation, Tokyo, JP;
Abstract
A laminating deviceincludes a vacuum gridfor holding a glass substratea curved padfacing the glass substratefor holding a laminated elementof a waferand an adhesive tapeand a driving elementfor moving the curved padtoward the vacuum gridThe curved padhas a curved surface regionso that the distance to a smooth surface regionof the vacuum gridis gradually increased from the center C toward the outside. By the driving elementthe vacuum gridand the curved padbecome close to each other in a substantially vacuum chamber. As a result, the glass substrateand the laminated elementare gradually laminated to each other while removing a very small amount of air that may be present therebetween to the outside.