The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2005
Filed:
Apr. 18, 2003
Applicant:
Siegfried Stacklies, Abtsgmuend, DE;
Inventor:
Siegfried Stacklies, Abtsgmuend, DE;
Assignee:
Carl Zeiss SMT AG, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B001/00 ;
U.S. Cl.
CPC ...
Abstract
A workpiece-surface processing head has at least one processing tool which comes into contact with the surface to be processed and whose longitudinal axis is oriented essentially perpendicularly to the surface to be processed. The processing tool, for processing the workpieces, can be traversed by means of at least one drive device in a direction (X; Y) running at least approximately perpendicularly to its longitudinal axis.