The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2005
Filed:
Aug. 03, 2004
Toshihiko Kikuchi, Nirasaki, JP;
Toshihiko Kikuchi, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Assuming that the s-polarized light of the incident light is reflected from the interface of the layer B, and the p-polarized light is reflected from the interface of the layer D, each amplitude reflectivity of Rs and Rp are calculated, and tan ψ of a function of the amplitude ratio ψ of the p-polarization component to the s-polarization component and cos Δ of a function of the phase difference Δ between the p-polarization component and the s-polarization component are calculated, thereby creating reference data. The thickness tA of the oxide filmis determined on the basis of the reference data. Thus, the thickness and cross section shape of the film formed on the multilayer interconnection are measured in a nondestructive manner with high throughput.