The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 2005

Filed:

Mar. 10, 2003
Applicants:

Gary Peter Widdowson, Hong Kong, CN;

Sun Kuen Wong, Hong Kong, CN;

Ajit Gaunekar, Singapore, SG;

Inventors:

Gary Peter Widdowson, Hong Kong, CN;

Sun Kuen Wong, Hong Kong, CN;

Ajit Gaunekar, Singapore, SG;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J040/14 ;
U.S. Cl.
CPC ...
Abstract

The position of a working point relative to a working space, such as a working point of a carriage on a gantry beam of an XY positioning table, is determined by measuring at least two sets of displacements. A first set of displacements, of the working point relative to an intermediate component, such as the gantry beam, includes a relatively large displacement (X) in a first linear degree of freedom and relatively small displacements (Y', Y′), in at least two of the five degrees of freedom other than the first. The second set of displacements, of the intermediate component relative to the working space, includes a relatively large displacement (Y, Y), in a second linear degree of freedom, and relatively small displacements (X′, X′), in at least two of the five degrees of freedom other than the second.


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