The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2005
Filed:
Feb. 17, 2004
Haruzo Miyashita, Fujiyoshida, JP;
Haruzo Miyashita, Fujiyoshida, JP;
Anelva Corporation, Fuchu, JP;
Abstract
A capacitive pressure sensor and its manufacturing method can simplify the alignment and the bonding process in a vacuum, and stably carry out the bonding process. The capacitive pressure sensor includes an insulating, first substrate with a capacitance electrode, a second substrate which has a diaphragm electrode so as to separate a vacuum chamber and a pressure-measuring chamber on respective surfaces, and an insulating, third substrate with a gas inlet. The substrates are bonded in a manner that the capacitance electrode faces the diaphragm electrode and the pressure-measuring chamber leads to the gas inlet. In addition, a getter chamber is formed in the same surface of the second substrate as the pressure-measuring chamber, and the getter chamber is connected to the vacuum chamber.