The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Feb. 10, 2003
Christopher J. Garmer, Rockville, MD (US);
Feliks B. Kleyner, Montgomery Village, MD (US);
Ilya M. Ayzman, Montgomery Village, MD (US);
Igor L. Goldman, Montgomery Village, MD (US);
Christopher J. Garmer, Rockville, MD (US);
Feliks B. Kleyner, Montgomery Village, MD (US);
Ilya M. Ayzman, Montgomery Village, MD (US);
Igor L. Goldman, Montgomery Village, MD (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
A radiant source for heating a workpiece such as a semiconductor wafer includes a plurality of radiant heating elements, arranged in an array that is generally concentric about a source center axis. A reflector has a reflecting surface that bounds a cavity or channel that contains the heating elements, the reflector comprising walls that extend around the center axis and that are finished for reflecting radiant energy emitted by the heating elements to a region occupied by a wafer. The channel reflecting surfaces comprise at least a part of a plane and/or cylinder and/or a cone and/or a convex to the heating elements curved surface of revolution bordering or spanning two or more adjacent heating elements.