The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Sep. 04, 2003
In-joon Yeo, Gyeonggi-do, KR;
Yong-sun Ko, Gyeonggi-do, KR;
In-seak Hwang, Gyeonggi-do, KR;
Byoung-moon Yoon, Gyeonggi-do, KR;
Dae-hyuk Chung, Gyeonggi-do, KR;
Kyung-hyun Kim, Seoul, KR;
In-Joon Yeo, Gyeonggi-do, KR;
Yong-Sun Ko, Gyeonggi-do, KR;
In-Seak Hwang, Gyeonggi-do, KR;
Byoung-Moon Yoon, Gyeonggi-do, KR;
Dae-Hyuk Chung, Gyeonggi-do, KR;
Kyung-Hyun Kim, Seoul, KR;
Abstract
Cleaning solutions for integrated circuit devices and methods of cleaning integrated circuit devices using the same are disclosed. The cleaning solution includes about 30% aqueous ammonia solution, acetic acid by a volume percent higher then a volume percent of the aqueous ammonia solution, and deionized water by a volume percent higher then the volume percent of the acetic acid. Additionally, disclosed are methods wherein the cleaning solution is formed on integrated circuit substrates having an exposed metal pattern formed thereon, and further providing mega-sonic energy to the film of the cleaning solution.