The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2005
Filed:
Aug. 02, 2002
Hisaharu Seita, Kanagawa, JP;
Hisaharu Seita, Kanagawa, JP;
Semiconductor Leading Edge Technologies, Inc., Ibaraki, JP;
Abstract
A substrate-container measuring device has a kinematic platehaving securing pinsprovided at positions defined by the SEMI standards. There is provided an optical distance-measuring sensor, in which a relative position between the optical distance-measuring sensorand the kinematic plateis fixed. A substrate-container measuring jigis placed on the kinematic plate. The substrate-container measuring jighas a base plateto be placed on the kinematic plate, and a slide platethat is slidable over the base plate. The base platehas a group of grooves which uniquely determine a relative position between the base plateand the kinematic plateas a result of being fitted with the corresponding securing pins