The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2005
Filed:
Apr. 19, 2004
Applicants:
Kieran P. Harney, Andover, MA (US);
Lawrence E. Felton, Hopkinton, MA (US);
Thomas Kieran Nunan, Carlisle, MA (US);
Susan A. Alie, Stoneham, MA (US);
Bruce Wachtmann, Concord, MA (US);
Inventors:
Kieran P. Harney, Andover, MA (US);
Lawrence E. Felton, Hopkinton, MA (US);
Thomas Kieran Nunan, Carlisle, MA (US);
Susan A. Alie, Stoneham, MA (US);
Bruce Wachtmann, Concord, MA (US);
Assignee:
Analog Devices, Inc., Norwood, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L023/12 ;
U.S. Cl.
CPC ...
Abstract
A MEMS device has at least one conductive path extending from the top facing side of its substrate (having MEMS structure) to the bottom side of the noted substrate. The at least one conductive path extends through the substrate as noted to electrically connect the bottom facing side with the MEMS structure.