The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2005
Filed:
Jan. 29, 2001
Applicant:
Hans-peter Feuerbaum, Heimstetten, DE;
Inventor:
Hans-Peter Feuerbaum, Heimstetten, DE;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J027/00 ; H01J037/244 ; H01J037/317 ;
U.S. Cl.
CPC ...
Abstract
The invention provides a miniaturized optical column for a charged particle beam apparatus for examining a specimen (). The column is constituted by, among other things, a charged particle source () for providing a beam of charged particles (); a lens system for guiding the beam of charged particles () from the source () onto the specimen (); and a housing () which, during operation, is set on beam boost potential.