The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
Jan. 08, 2003
Masahito Kobayashi, Nirasaki, JP;
Haruhiko Yoshioka, Nirasaki, JP;
Takafumi Fujita, Kawasaki-Shi, Kanagawa-Ken, JP;
Masahito Kobayashi, Nirasaki, JP;
Haruhiko Yoshioka, Nirasaki, JP;
Takafumi Fujita, Kawasaki-Shi, Kanagawa-Ken, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Other;
Abstract
This invention is a probe apparatus including: a stage onto which a substrate to be processed is placed, a semiconductor device having a plurality of groups of electrode pads being formed on the substrate to be processed; a probe-card holding mechanism that holds a probe card provided with a group of probe needles corresponding to each group of electrode pads; and a driving mechanism that moves the stage and causes the group of probe needles to successively come in contact with the respective groups of electrode pads. A converting device that converts mechanical vibration energy generated in components of the probe apparatus into electrical energy, and an electrical circuit that discreates an electrical current based on the electric energy converted by the converting device are further provided.