The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
Mar. 12, 2004
Kazutoshi Kaji, Hitachi, JP;
Takashi Aoyama, Tokai, JP;
Shunroku Taya, Mito, JP;
Hiroyuki Tanaka, Hitachinaka, JP;
Shigeto Isakozawa, Hitachinaka, JP;
Kazutoshi Kaji, Hitachi, JP;
Takashi Aoyama, Tokai, JP;
Shunroku Taya, Mito, JP;
Hiroyuki Tanaka, Hitachinaka, JP;
Shigeto Isakozawa, Hitachinaka, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
The present invention provides an ultimate analyzer which displays an element distribution image of an object with high contrast and high accuracy. A scanning transmission electron microscope and a method of analyzing elements using the ultimate analyzer is also provided. The ultimate analyzer comprises a scattered electron beam detector for detecting an electron beam scattered by an object; an electron spectrometer for energy dispersing an electron beam transmitted through the object; an electron beam detector for detecting said dispersed electron beam; and a control unit for analyzing elements based on an output signal of the electron beam detected by the electron beam detector and an output signal of the electron beam detected by the scattered electron beam detector.