The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
Mar. 05, 2003
Applicants:
Peter Lahnor, Dresden, DE;
Olaf Kuehn, Dresden, DE;
Andreas Roemer, Dresden, DE;
Alexander Simpson, Warrenville, IL (US);
Inventors:
Peter Lahnor, Dresden, DE;
Olaf Kuehn, Dresden, DE;
Andreas Roemer, Dresden, DE;
Alexander Simpson, Warrenville, IL (US);
Assignee:
Infineon Technologies Aktientgesellschaft, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B049/00 ;
U.S. Cl.
CPC ...
Abstract
A method of determining the endpoint of a planarizing process is disclosed. An endpoint detection signal is selectively sampled from at least one predetermined location within a planarizing region defined on a planarizing web. Planarization is stopped when the endpoint criterion based on the endpoint detection signal is detected.