The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Aug. 08, 2002
Emanuel Elyasaf, Rehovot, IL;
Haim Feldman, Nof-Ayalon, IL;
Simon Yalov, Ashdod, IL;
Eitan Lahat, Yavne, IL;
Emanuel Elyasaf, Rehovot, IL;
Haim Feldman, Nof-Ayalon, IL;
Simon Yalov, Ashdod, IL;
Eitan Lahat, Yavne, IL;
Applied Materials, Israel, Ltd., Rehovot, IL;
Abstract
Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.