The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Aug. 08, 2003
Tadashi Fujieda, Mito, JP;
Kishio Hidaka, Hitachiohta, JP;
Mitsuo Hayashibara, Hitachinaka, JP;
Shuichi Suzuki, Hitachi, JP;
Yoshimichi Numata, Mito, JP;
Toshiaki Horiuchi, Hitachi, JP;
Tadashi Fujieda, Mito, JP;
Kishio Hidaka, Hitachiohta, JP;
Mitsuo Hayashibara, Hitachinaka, JP;
Shuichi Suzuki, Hitachi, JP;
Yoshimichi Numata, Mito, JP;
Toshiaki Horiuchi, Hitachi, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A high reliability emission source is constructed to secure the ohmic contact between a carbon nanotube and an electrically conductive base material, so as to ensure sufficient joining strength, and to provide for easy beam shaft adjustment. An electron microscope for realizing high resolution, high brightness, a reduction in sample damage due to a reduction in acceleration voltage, a reduction in cost and compactness, and an electron beam drawing device for realizing high definition, high efficiency, a reduction in cost and compactness in comparison with the conventional device, is achieved by using this high reliability emission source. In the emission source, the carbon nanotube is attached to the tip central portion of the electrically conductive base material through an electrically conductive joining material or an organic material by carbonization-processing the organic material by heat treatment, or by diffusive joining.