The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Sep. 10, 2001
Eitan Zait, Kibbutz Hanita, IL;
Vladimir Dmitriev, St. Petersburg, RU;
Nikolay Guletsky, St. Petersburg, RU;
Sergei Oshemkov, St. Petersburg, RU;
Eitan Zait, Kibbutz Hanita, IL;
Vladimir Dmitriev, St. Petersburg, RU;
Nikolay Guletsky, St. Petersburg, RU;
Sergei Oshemkov, St. Petersburg, RU;
U-C-Laser Ltd., Karmiel, IL;
Abstract
A method and apparatus for manufacturing patterns on a reticle blank comprising a substrate made from material transparent to UV irradiation and having a first surface and a second opposite surface, the first surface coated with a chrome layer. The method comprises providing ultra-short pulsed laser beams, focusing means, relative displacement facilitator for facilitating relative displacement of the reticle blank relative to said at least one of a plurality of target locations, and a controller for controlling the synchronization and operation of the laser beam source, the focusing means and the relative displacement facilitator. Ultra-short pulsed laser beam is irradiated in a predetermined pattern directed at the second surface and passing through the substrate, focused on the chrome layer or on its proximity.