The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2005
Filed:
Nov. 30, 2000
Marc W. Cantell, Sheldon, VT (US);
Wesley Natzle, New Paltz, NY (US);
Steven M. Ruegsegger, Jericho, VT (US);
Marc W. Cantell, Sheldon, VT (US);
Wesley Natzle, New Paltz, NY (US);
Steven M. Ruegsegger, Jericho, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Lines are fabricated by patterning a hard mask to provide a line segment, the line segment having a first dimension measured across the line segment; reacting a surface layer of the line segment to form a layer of a reaction product on a remaining portion of the line segment; and removing the reaction product without attacking the remaining portion of the line segment and without attacking the substrate to form the line segment with a dimension across the line segment that is smaller than the first dimension.