The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2005
Filed:
Dec. 28, 1999
Matsutaro Miyamoto, Chigasaki, JP;
Hiroaki Ogamino, Kawasaki, JP;
Tetsuma Ikegami, Yokohama-shi, JP;
Hiroyuki Kawasaki, Chigasaki, JP;
Matsutaro Miyamoto, Chigasaki, JP;
Hiroaki Ogamino, Kawasaki, JP;
Tetsuma Ikegami, Yokohama-shi, JP;
Hiroyuki Kawasaki, Chigasaki, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A turbo-molecular pump of high safety and reliability was presented, so that if an abnormal condition should develop on the rotor side, it will not lead to any damage to the stationary portions such as the stator or pump casing to cause loss of vacuum in a vacuum processing system. The turbo-molecular pump includes a rotor; a stator assembly surrounding the rotor; and a casing portion surrounding the stator assembly, wherein at least a partial clearance is formed between the stator assembly and the casing portion, so that, when an abnormal torque is applied from the rotor to the stator assembly, direct impact transmission is prevented from the stator assembly to the casing portion.