The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2005
Filed:
Sep. 25, 2002
Chung-hsien Lin, Hsinchu, TW;
Shu-hui Tsai, Hsinchu, TW;
Chen-hsun Du, Hsinchu, TW;
Ruey-shing Hunag, Hsinchu, TW;
Chung-Hsien Lin, Hsinchu, TW;
Shu-Hui Tsai, Hsinchu, TW;
Chen-Hsun Du, Hsinchu, TW;
Ruey-Shing Hunag, Hsinchu, TW;
Asia Pacific Microsystems, Inc., Hsinchu, TW;
Abstract
A film bulk acoustic device having integrated trimmable device comprises a FBAR and a integrated tunable and trimmable device being integrated on a common substrate, at least a common electrode or piezoelectric layer. By trimming the integrated trimmable device or the FBAR and alter either the capacitance or inductance of the integrated trimmable device until the film bulk acoustic device having integrated trimmable device achieves the target resonance frequency. By taking advantage of the electrostatic force, the integrated tunable device is capable of providing tuning until the film bulk acoustic device having integrated tunable device achieves the target resonance frequency.