The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 02, 2005

Filed:

Nov. 26, 2001
Applicants:

Yanling Zhou, Gifu, JP;

Yasutaka Ito, Gifu, JP;

Satoru Kariya, Gifu, JP;

Inventors:

Yanling Zhou, Gifu, JP;

Yasutaka Ito, Gifu, JP;

Satoru Kariya, Gifu, JP;

Assignee:

Ibiden Co., Ltd., Ogaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B003/68 ; C23C016/00 ;
U.S. Cl.
CPC ...
Abstract

A ceramic heater manufacturing method capable of preventing reflection of a laser beam at the time the performing trimming by irradiation using a laser beam and performing trimming of a resistance heating element or a conductor layer. The ceramic heater manufacturing method includes forming a resistance heating element having a pattern on a surface of a ceramic substrate; and irradiating a laser beam onto the resistance heating element to form a gutter or a cut after a preceding step to adjust a resistance value of the resistance element. When the resistance heating element is formed on the surface of the ceramic substrate, the resistance heating element is adjusted to have a surface roughness Ra of 0.01 μm or more in accordance with MS B 0601.


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