The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2005
Filed:
Mar. 26, 2002
Applicants:
Akira Usui, Tokyo, JP;
Masatomo Shibata, Ibaraki, JP;
Yuichi Oshima, Ibaraki, JP;
Inventors:
Assignees:
NEC Corporation, Tokyo, JP;
Hitachi Cable, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L021/00 ;
U.S. Cl.
CPC ...
Abstract
To provide a semiconductor substrate of a group III nitride with low defect density and little warp, this invention provides a process comprising such steps of: