The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2005
Filed:
Jul. 02, 2001
Nobuo Yamaguchi, Tokyo, JP;
Nobuo Yamaguchi, Tokyo, JP;
Anelva Corporation, Fuchu, JP;
Abstract
Electrostatic attraction is performed on a plate-shaped objectin that an attraction power sourceapplies a voltage to a pair of attraction terminalsmounted inside a dielectric block, the surface of which is an attraction surface, thereby inducing static electricity in an attraction surface. The attraction power sourceadjusts the surface potential of a plate-shaped objectby independently controlling voltages applied to the respective attraction terminals. Processing is carried out on the surface of the plate-shaped objectwhile the injection of charged particles into the plate-shaped objectis suppressed. A control partwhich controls the attraction power sourcerecords, in a recording part, data obtained by measuring in advance the surface potential of the plate-shaped objectwhile respectively changing the voltage applied to the attraction terminals, and controls the attraction power sourcewith a pattern selected in accordance with this data.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile